Construction and Validation of an Angle-Resolved Scatterometer for Investigation of 157 nm Optical Materials
نویسنده
چکیده
scatterometer optimized for near angle measurements. The system relies on a unique beam apodization scheme using gas phase absorption to produce a Gaussian pupil function. Initial results show two orders of magnitude improvement over a previous design employing a uniform pupil function. The background signature is approaching sufficient levels to measure small angle scatter from high quality EUV mirrors.
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تاریخ انتشار 2003